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Proceedings Paper

Calculation of an iris size in 24-in. Fizeau interferometer
Author(s): Sen Han
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Paper Abstract

In a 24' phase shifting Fizeau interferometer designed and built by Veeco Metrology, coherent imaging method, which is different from one in conventional interferometers, is adopted. To decrease the some of the fixed pattern noise caused by dust on the optics within imaging system, which affects on transfer function, and to eliminate the reflections from the wedge of test glass in the measurement of homogeneity, an iris should be placed at the focal plane before final imaging lens. Its size depends both on the transfer function requirement and on the wedge angle of the test glass.

Paper Details

Date Published: 11 November 1999
PDF: 5 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369225
Show Author Affiliations
Sen Han, Veeco Metrology (United States)


Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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