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Proceedings Paper

Vibration-compensated interferometer for measuring cryogenic mirrors
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Paper Abstract

An advanced interferometer was built for measuring large mirrors at cryogenic temperatures. This instrument uses active control to compensate the effects of vibration to allow high resolution phase shift interferometry. A digital signal processor and high speed phase control from an electro-optic modulator allow phase measurements at 4000 Hz. These measurements are fed back to a real time servo in the DSP that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. This instrument is planned to be integrated at NASA Marshall Space Flight Center's X-ray Calibration Facility for measuring NGST mirrors at 40 K.

Paper Details

Date Published: 11 November 1999
PDF: 8 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369217
Show Author Affiliations
Chunyu Zhao, Optical Sciences Ctr./Univ. of Arizona (United States)
James H. Burge, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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