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Proceedings Paper

Surface profilometry of a thick liquid lens on a solid surface using a high-numerical-aperture phase-shifting laser feedback interferometer
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Paper Abstract

We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitesimal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.

Paper Details

Date Published: 11 November 1999
PDF: 10 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369214
Show Author Affiliations
David G. Fischer, NASA Glenn Research Ctr. (United States)
Ben Ovryn, NASA Glenn Research Ctr. and Case Western Reserve Univ. (United States)


Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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