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Proceedings Paper

Two error sources in grating projection profilometry: analysis and compensation
Author(s): Yudong Hao; Yang Zhao; Dacheng Li
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Paper Abstract

In this paper is introduced a new concept -- image point displacement (IPD), on the basis of which the principles and key tasks of light pattern projection profilometry are re- interpreted and evaluated. Two error sources that have not been addressed adequately are analyzed in detail. One is coordinate deviation, which comes from the different magnification at different depth. The other is the nonlinearity of the phase-IPD and phase-height relationship. These error sources will be more and more non-negligible as researchers make their ways to improve accuracy and increase measuring range. Some compensation approaches are also proposed, which have been verified by numerical simulations and experiments.

Paper Details

Date Published: 11 November 1999
PDF: 5 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369196
Show Author Affiliations
Yudong Hao, Tsinghua Univ. (China)
Yang Zhao, Tsinghua Univ. (United States)
Dacheng Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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