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Proceedings Paper

Three-dimensional surface profilometry using structured liquid crystal grating
Author(s): Ken Yamatani; Hiroo Fujita; Masayuki Yamamoto; Akira Suguro; Yukitoshi Otani; Shigeru Morokawa; Toru Yoshizawa
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Paper Abstract

This paper describes a device for measuring the three dimensional surface profile using a grating projection method. A phase shifting technique without any mechanical moving is expected for profile analysis. A grating that is a key component in this technique is made using an active controlled liquid crystal (LC). This LC grating has the performances of more than 8 bits of gray levels and its grating period is 50 micro-meters per line without any colored filters. Surface profiles of some samples are measured for the demonstration of the system.

Paper Details

Date Published: 11 November 1999
PDF: 6 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369195
Show Author Affiliations
Ken Yamatani, Tokyo Univ. of Agriculture and Technology (Japan)
Hiroo Fujita, Citizen Watch Co., Ltd. (Japan)
Masayuki Yamamoto, Tokyo Univ. of Agriculture and Technology (Japan)
Akira Suguro, Citizen Watch Co., Ltd. (Japan)
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)
Shigeru Morokawa, Citizen Watch Co., Ltd. (Japan)
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)

Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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