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Proceedings Paper

Absolute measurement of surface profiles with phase-shifting projected fringe profilometry
Author(s): Hongyu Liu; Benjamin A. Bard; Guowen Lu; Shudong Wu
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Paper Abstract

Phase-shifting projected fringe profilometry (PSPFP) is a powerful tool in the profile inspection of a large variety of rough surfaces. In many applications, absolute PSPFP measurements, capable of compensating for the lateral distortions in the measured object shape and providing an expression of the measured shape under a predefined reference system, are highly desired. In this paper, an absolute PSPFP technique combining the lateral calibration and the phase-to- depth calibration is proposed. The principles of the proposed absolute PSPFP measurement technique will be discussed together with the calibration and measurement methods based on a particular formalism of absolute PSPFP measurements.

Paper Details

Date Published: 11 November 1999
PDF: 8 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369194
Show Author Affiliations
Hongyu Liu, The Pennsylvania State Univ. (United States)
Benjamin A. Bard, The Pennsylvania State Univ. (United States)
Guowen Lu, The Pennsylvania State Univ. (United States)
Shudong Wu, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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