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Proceedings Paper

New developments and applications in the production of 3D microstructures by laser micromachining
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Paper Abstract

Micro-machining techniques using pulsed lasers are currently being applied world-wise in many diverse industrial application areas including biomedical devices, printers, flat-panel displays, semiconductors devices and telecommunication systems. In particular, the use of excimer lasers has been at the forefront of the new developments in the manufacture of complex micro-structures for the production of micro-optical-electro-mechanical-systems units such as nozzles, optical devices and sensors. This paper reviews the fundamentals of excimer laser micromachining techniques and details recent developments which have enhanced the capabilities of these approaches. Application areas where these techniques are of interest are highlighted.

Paper Details

Date Published: 4 November 1999
PDF: 10 pages
Proc. SPIE 3898, Photonic Systems and Applications in Defense and Manufacturing, (4 November 1999); doi: 10.1117/12.368513
Show Author Affiliations
Nadeem Hasan Rizvi, Exitech Ltd. (United Kingdom)
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Malcolm C. Gower, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 3898:
Photonic Systems and Applications in Defense and Manufacturing
Yee Loy Lam; Koji Ikuta; Metin S. Mangir, Editor(s)

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