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Proceedings Paper

Precision of scanning magnetic and electric rheology X-Y-Z manipulators
Author(s): Eugeny A. Deuline; Valeri P. Mikhailov; Oleg N. Eliseev; Victor V. Sytchev
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Paper Abstract

The manipulators of scanning tunneling microscope (STM) usually use 'long-travel' mechanically drived X-Y stages with piezoceramic actuators together with piezoceramic tubes. Magnetic- and electric Rheology manipulators combine the functions of the both drives in single unit and ensure the precision and the length of the travel L <EQ 200 mm along X, Y axes and L <EQ 400 mic along Z axe. Error of positioning of loop-contorlled MR- and ER drive may be expressed.

Paper Details

Date Published: 4 November 1999
PDF: 4 pages
Proc. SPIE 3898, Photonic Systems and Applications in Defense and Manufacturing, (4 November 1999); doi: 10.1117/12.368491
Show Author Affiliations
Eugeny A. Deuline, Bauman Moscow State Technical Univ. (Russia)
Valeri P. Mikhailov, Bauman Moscow State Technical Univ. (Russia)
Oleg N. Eliseev, Bauman Moscow State Technical Univ. (Russia)
Victor V. Sytchev, S.P.A. Astrophysika (Russia)


Published in SPIE Proceedings Vol. 3898:
Photonic Systems and Applications in Defense and Manufacturing
Yee Loy Lam; Koji Ikuta; Metin S. Mangir, Editor(s)

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