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Proceedings Paper

Programmable MEMS capacitor arrays
Author(s): Bruce E. Duewer; John M. Wilson; David A. Winick; Paul D. Franzon
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Paper Abstract

We describe a programmable capacitor technology under development at NCSU and its potential application in building programmable interconnect devices useful for system level connectivity functions, phased array beam steering, and RF switching. Crossbars are made from arrays of electrostatically controlled bistable MEMS-based capacitors. These new devices allow faster signaling and consume less power than BiCMOS crossbars. They also allow critical RF components to be shrinked in size substantially. We describe the essential elements of these arrays and present results obtained so far.

Paper Details

Date Published: 8 October 1999
PDF: 10 pages
Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); doi: 10.1117/12.368433
Show Author Affiliations
Bruce E. Duewer, North Carolina State Univ. (United States)
John M. Wilson, North Carolina State Univ. (United States)
David A. Winick, North Carolina State Univ. (United States)
Paul D. Franzon, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 3893:
Design, Characterization, and Packaging for MEMS and Microelectronics
Bernard Courtois; Serge N. Demidenko, Editor(s)

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