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Proceedings Paper

Low-cost metal micropump for drug delivery
Author(s): Francis E.H. Tay; G. L. Xu; Wen On Choong; Hong Xue
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Paper Abstract

The design, fabrication and characterization of a micro-pump for drug delivery are presented in this paper. A low cost metallic micro-pump capable of handling low fluid volumes and having the potential for application in drug delivery is described. The pump is of the reciprocating displacement type and is driven by a piezoelectric diaphragm actuator. The main parts of the pump are made of stainless steel and can be readily fabricated using precision casting technology. The check valves are made form a polyamide membrane using photolithography. Equations presented in this report are useful for predicting the behavior of the actuation unit as well as the valve unit. Based on the analysis, a prototype of the micro-pump is designed and fabricated, from which a maximum pump rate of 255ul/min for water was achieved.

Paper Details

Date Published: 8 October 1999
PDF: 7 pages
Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); doi: 10.1117/12.368430
Show Author Affiliations
Francis E.H. Tay, National Univ. of Singapore (Singapore)
G. L. Xu, National Univ. of Singapore (Singapore)
Wen On Choong, National Univ. of Singapore (Singapore)
Hong Xue, National Univ. of Singapore (United States)

Published in SPIE Proceedings Vol. 3893:
Design, Characterization, and Packaging for MEMS and Microelectronics
Bernard Courtois; Serge N. Demidenko, Editor(s)

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