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Proceedings Paper

Optical system design for excimer laser materials processing
Author(s): Lars Unnebrink; Thomas F. E. Henning; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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Paper Abstract

Non-imaging integrator which can be used for laser beam homogenization in material processing with excimer laser radiation are analyzed with regards to geometrical and statistical optics. A model for the transversal degree of coherence of the laser radiation are analyzed with regards to geometrical and statistical optics. A model of the transversal degree of coherence of the laser radiation is presented in order to estimate the performance of the integrating devices for the partially coherent excimer laser radiation. This is necessary for a more relevant design of those elements than a design by geometric optical means only. The concept of non-imaging integrators is enhanced by separating the multifaceted element from the focusing lens. This separation provides more flexibility in the processing distance of the optical system. A further enhancement is the combination of such a system with an imaging lens in order to create a system which produces a top hat fluence distribution with variable size for materials processing applications.

Paper Details

Date Published: 5 October 1999
PDF: 10 pages
Proc. SPIE 3779, Current Developments in Optical Design and Optical Engineering VIII, (5 October 1999); doi: 10.1117/12.368233
Show Author Affiliations
Lars Unnebrink, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Thomas F. E. Henning, Fraunhofer-Institut fuer Lasertechnik (Germany)
Ernst-Wolfgang Kreutz, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Reinhart Poprawe, Rheinische-Westfaelische Technische Hochschule Aachen and Fraunhofer-Institut fuer Laserte (Germany)


Published in SPIE Proceedings Vol. 3779:
Current Developments in Optical Design and Optical Engineering VIII
Robert E. Fischer; Warren J. Smith, Editor(s)

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