Share Email Print

Proceedings Paper

Novel design concepts for UV laser beam shaping
Author(s): Joerg Bernges; Lars Unnebrink; Thomas F. E. Henning; Ernst-Wolfgang Kreutz; Reinhart Poprawe
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recent developments in the field of high transmitting beam shaping optics for material processing are presented. Central parts of these optics are non-rotationally symmetric optical elements (NOEs). Advanced design principles for NOEs are presented. An optical setup containing a NOE and a system for the adaptation of the spatial coherence properties of excimer lasers to the processing requirements are presented together with beam diagnosis and material processing results. In comparison to results obtained earlier a largely increased beam shaping performance is demonstrated.

Paper Details

Date Published: 5 October 1999
PDF: 8 pages
Proc. SPIE 3779, Current Developments in Optical Design and Optical Engineering VIII, (5 October 1999); doi: 10.1117/12.368201
Show Author Affiliations
Joerg Bernges, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Lars Unnebrink, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Thomas F. E. Henning, Fraunhofer-Institut fuer Lasertechnik (Germany)
Ernst-Wolfgang Kreutz, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Reinhart Poprawe, Rheinische-Westfaelische Technische Hochschule Aachen and Fraunhofer-Institut fuer Laserte (Germany)

Published in SPIE Proceedings Vol. 3779:
Current Developments in Optical Design and Optical Engineering VIII
Robert E. Fischer; Warren J. Smith, Editor(s)

© SPIE. Terms of Use
Back to Top