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Proceedings Paper

Adaptive optic correction using silicon-based deformable mirros
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Paper Abstract

A micromachined deformable mirror ((mu) -DMs) for optical wavefront correction is described. Design and manufacturing approaches for (mu) -DMs are detailed. The (mu) -DM employs a flexible silicon membrane supported by mechanical attachments to an array of electrostatic parallel plate actuators. Devices are fabricated through surface micromachining using polycrystalline silicon thin films. (mu) -DM membranes measuring 2 mm X 2 mm X 2 micrometers , supported by 100 actuators are described. Figures of merit include stroke of 2 micrometers , resolution of 10 nm, and frequency bandwidth DC - 7 kHz. The devices are compact, inexpensive to fabricate, exhibit no hysteresis, and use only a small fraction of the power required for conventional DMs. Performance of an adaptive optics system using a (mu) - DM was characterized in a closed-loop control experiment. Significant reduction in quasi-static wavefront phase error was achieved. Advantages and limitations of (mu) -DMs are described, in relation to conventional adaptive optics systems and to emerging applications of adaptive optics, such as high resolution correction, small aperture systems, and optical communication.

Paper Details

Date Published: 3 November 1999
PDF: 11 pages
Proc. SPIE 3760, High-Resolution Wavefront Control: Methods, Devices, and Applications, (3 November 1999); doi: 10.1117/12.367582
Show Author Affiliations
Julie A. Perreault, Boston Univ. (United States)
Thomas G. Bifano, Boston Univ. (United States)
Bruce Martin Levine, Adaptive Optics Associates, Inc. (United States)


Published in SPIE Proceedings Vol. 3760:
High-Resolution Wavefront Control: Methods, Devices, and Applications
John D. Gonglewski; Mikhail A. Vorontsov, Editor(s)

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