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Proceedings Paper

Spray cleaning with hydrofluorocarbon solutions
Author(s): Robert Kaiser; Ryan S. Miller; Jeremy T. Cardin
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Paper Abstract

Cleaning by spraying with an inert liquid (such as a hydrofluorocarbon or hydrofluoroether) is shown to be an effective means of removing contaminating particles from the surfaces of objects. This type of cleaning has resulted in surface cleanliness levels of better than class 200. It was also determined that liquid spraying with these fluids provides a suitable replacement for CFC-113 as a cleaning medium. A variety of substrates, including silicon wafers, coated gold and aluminum coated mirrors, and zinc sulfide windows for FTIR (Fourier Transform Infra Red) spectroscopy test cells were spray cleaned to assess materials compatibility. None of these surfaces showed any apparent deleterious effects from spraying.

Paper Details

Date Published: 25 October 1999
PDF: 11 pages
Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); doi: 10.1117/12.366724
Show Author Affiliations
Robert Kaiser, Entropic Systems, Inc. (United States)
Ryan S. Miller, Entropic Systems, Inc. (United States)
Jeremy T. Cardin, Entropic Systems, Inc. (United States)

Published in SPIE Proceedings Vol. 3784:
Rough Surface Scattering and Contamination
Zu-Han Gu; Philip T. C. Chen; Zu-Han Gu; Alexei A. Maradudin; Alexei A. Maradudin, Editor(s)

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