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Proceedings Paper

Polarization of light scattered by spheres on a dielectric film
Author(s): Lipiin Sung; George W. Mulholland; Thomas A. Germer
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Paper Abstract

Bidirectional ellipsometric measurements were conducted on a model system containing spherical particles on silicon surfaces coated with dielectric polymer films. The principal angle of polarization, (eta) (p), and the degree of linear polarization, PL(p), of the light scattered into directions out of the plane of incidence were measured using p-polarized, 532 nm light. Results are presented and compared to those from particles on a bare silicon substrate. Spheres of diameter 181 nm and 217 nm and film thicknesses ranging from 55 nm to 140 nm were used to test two theoretical models for light scattering: a Mie-surface double-interaction approximation and a finite-element time-domain implementation of Maxwell's equations. The measurements and the modeling demonstrate the application of bidirectional ellipsometry for characterizing the sizes of particulate contaminates on surfaces.

Paper Details

Date Published: 25 October 1999
PDF: 8 pages
Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); doi: 10.1117/12.366712
Show Author Affiliations
Lipiin Sung, National Institute of Standards and Technology and Univ. of Maryland/College Park (United States)
George W. Mulholland, National Institute of Standards and Technology (United States)
Thomas A. Germer, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 3784:
Rough Surface Scattering and Contamination
Zu-Han Gu; Philip T. C. Chen; Zu-Han Gu; Alexei A. Maradudin; Alexei A. Maradudin, Editor(s)

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