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Proceedings Paper

Noncontact high-precision surface 3D profiler
Author(s): Jianfeng Jiang; Yonghui He; Wansheng Zhao
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Paper Abstract

This paper presents a system to measure three-dimensional profile of a surface, based on the principle of scanning white light interferometry. It adopts a basic structure of Michelson interferometer and semiautomatic fast focus-adjusting mechanism. Through increasing the sampling frequency and applying the feature extracting algorithm, the precision and efficiency of measurement can be increased together.

Paper Details

Date Published: 25 October 1999
PDF: 8 pages
Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); doi: 10.1117/12.366700
Show Author Affiliations
Jianfeng Jiang, Harbin Institute of Technology (China)
Yonghui He, Shanghai BaoSteel Group Corp. (China)
Wansheng Zhao, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 3784:
Rough Surface Scattering and Contamination
Zu-Han Gu; Philip T. C. Chen; Zu-Han Gu; Alexei A. Maradudin; Alexei A. Maradudin, Editor(s)

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