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Proceedings Paper

Three-dimensional topography measurement with triangular beam scanning technique
Author(s): Jianfeng Jiang; Yonghui He; Wansheng Zhao
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Paper Abstract

This paper presents a system for three-dimensional topography measurement, of both smooth and rough surface, based on triangular beam scanning technique. This system utilizes a simple but efficient principle based on the general principle of light-section method and the idea of light scanning technique to acquire topography. Its ability of anti- interference is powerful and it can be used at locale of manufacturing.

Paper Details

Date Published: 25 October 1999
PDF: 8 pages
Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); doi: 10.1117/12.366699
Show Author Affiliations
Jianfeng Jiang, Harbin Institute of Technology (China)
Yonghui He, Shanghai BaoSteel Group Corp. (China)
Wansheng Zhao, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 3784:
Rough Surface Scattering and Contamination
Zu-Han Gu; Philip T. C. Chen; Zu-Han Gu; Alexei A. Maradudin; Alexei A. Maradudin, Editor(s)

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