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Proceedings Paper

Optical surface profilometry in China
Author(s): Deyan Xu; Weixing Shen
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Paper Abstract

This article describes briefly the optical surface profileometry in China, including several result of its theory research, optical profiler development and some problems using the optical profiler.

Paper Details

Date Published: 25 October 1999
PDF: 10 pages
Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); doi: 10.1117/12.366694
Show Author Affiliations
Deyan Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Weixing Shen, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3784:
Rough Surface Scattering and Contamination
Zu-Han Gu; Philip T. C. Chen; Zu-Han Gu; Alexei A. Maradudin; Alexei A. Maradudin, Editor(s)

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