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Proceedings Paper

Calibration procedures for a two-modular generalized ellipsometer
Author(s): Gerald E. Jellison; Frank A. Modine; Chi Chen
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Paper Abstract

A Two-Modulator Generalized Ellipsometer (2-MGE) has been extremely useful in characterizing optical properties of uniaxial bulk materials, thin films and diffraction gratings. The instrument consists of two polarizer- photoelastic modulator pairs, one operating as the polarization state generator and the other as the polarization state detector. Each photoelastic modulator operates at a different resonant frequency, making it possible to measure eight elements of the reduced sample; Mueller matrix simultaneously. In certain configurations, light reflection from non-depolarizing anisotropic samples can be completely characterized by a single measurement, and the entire reduced Jones matrix can be determined, including the cross polarization coefficients. The calibration of the instrument involves the measurement of the azimuthal angle of the polarizer with respect to the modulator, the modulation amplitude, and the modulator strain for each polarizer photoelastic modulator pair, where the lat two are functions of wavelengths. In addition, it is essential to calibrate the azimuthal modulator pair, where the lat two are functions of wavelengths. In addition, it is essential to calibrate the azimuthal angles of the polarization state generator and the polarization state detector with respect to the plane of incidence in the ellipsometry configuration that is used in the measurements. Because two modulators operating at different frequencies are used, these calibrations are actually easier and more accurate than for one modulator ellipsometers. In this paper, we will discuss these calibrations and the resultant accuracy limitations of the 2-MGE.

Paper Details

Date Published: 25 October 1999
PDF: 11 pages
Proc. SPIE 3754, Polarization: Measurement, Analysis, and Remote Sensing II, (25 October 1999); doi: 10.1117/12.366357
Show Author Affiliations
Gerald E. Jellison, Oak Ridge National Lab. (United States)
Frank A. Modine, Oak Ridge National Lab. (United States)
Chi Chen, Oak Ridge National Lab. (United States)


Published in SPIE Proceedings Vol. 3754:
Polarization: Measurement, Analysis, and Remote Sensing II
Dennis H. Goldstein; David B. Chenault, Editor(s)

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