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Proceedings Paper

FT-IR-based ellipsometer using high-quality Brewster-angle polarizers
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Paper Abstract

A Fourier transform IR spectrometer-based broadband IR ellipsometer has been developed around a pair of high- quality Brewster angle polarizers. These polarizers consist of four Ge plates in a chevron geometry and have been measured to have extinction ratios of less than 10-5 in the IR spectral region. The ellipsometer can be used in transmission or reflection mode for angles of incidence of 100 to near grazing. We describe the design and construction of the ellipsometer and initial testing of the system using measurements on Si wafers from 2 micrometers to 12 micrometers wavelength. 5

Paper Details

Date Published: 25 October 1999
PDF: 9 pages
Proc. SPIE 3754, Polarization: Measurement, Analysis, and Remote Sensing II, (25 October 1999); doi: 10.1117/12.366338
Show Author Affiliations
Simon G. Kaplan, National Institute of Standards and Technology (United States)
Leonard M. Hanssen, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 3754:
Polarization: Measurement, Analysis, and Remote Sensing II
Dennis H. Goldstein; David B. Chenault, Editor(s)

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