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Proceedings Paper

Integration of a microlens on a micro XY-stage
Author(s): Che-Heung Kim; Yong-Kweon Kim
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Paper Abstract

The precise position control of an optic element is a quite important technology and thus has many applications in modern optic system. This paper describes the optic system composed of a micro lens and positioning actuator. Two types of the micro Fresnel lens and the micro spherical lens are fabricated by using UV-lithography and reactive ion etching (RIE). The monolithic spherical lens is fabricated through the photo-thermal technique of photoresist. 3 mm-focal length with 246 micrometers -diameter Fresnel lens and 31 micrometers - focal length with 50 micrometers -diameter spherical lens are fabricated. The XY-stage is proposed as a control actuator, which is a 2-degree of freedom-stage structure with a pari of perpendicularly combined comb drive. The travel range of the micro XY-stage is measured 48 micrometers in each X and Y direction. The mechanical interference between X- and Y-axis is negligible. Integration process of these two parts is based on the concept of in-situ process using anodic bonding. This device is expected to be applicable for the fields of optical pickup, light beam aligning and optical signal sensing.

Paper Details

Date Published: 1 October 1999
PDF: 9 pages
Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364508
Show Author Affiliations
Che-Heung Kim, Seoul National Univ. (South Korea)
Yong-Kweon Kim, Seoul National Univ. (South Korea)


Published in SPIE Proceedings Vol. 3892:
Device and Process Technologies for MEMS and Microelectronics
Kevin H. Chau; Sima Dimitrijev, Editor(s)

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