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Proceedings Paper

Lens temperature and performance correlation analysis
Author(s): Jian-Yuan Chiou; M. F. Chen; C. L. Liu; Chih-Chien Hung
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Paper Abstract

Lens temperature is a dominant factor for lens performance in steppers. The lens temperature of steppers was controlled tightly with TCU system. This paper aims to discuss lens UDOF, NCE, Astigmatism, FPD, IPT, lens heating performance and CD repeatability. From experiment result, the optimized lens temperature is 22 degrees C of '74' lens. It resulted in maximum UDOF, minimum Astigmatism, minimum FPD, minimum NCE and minimum IPT. And under this temperature, there is minimum Intra-field CED STD and range on the conditions of lens cooling and heating. Non-optimized lens temperature will result in UDOF decrease and Aerial image distortion.

Paper Details

Date Published: 1 October 1999
PDF: 5 pages
Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364506
Show Author Affiliations
Jian-Yuan Chiou, Taiwan Semiconductor Manufacturing Co. (Taiwan)
M. F. Chen, Taiwan Semiconductor Manufacturing Co. (Taiwan)
C. L. Liu, Taiwan Semiconductor Manufacturing Co. (Taiwan)
Chih-Chien Hung, Taiwan Semiconductor Manufacturing Co. (Taiwan)


Published in SPIE Proceedings Vol. 3892:
Device and Process Technologies for MEMS and Microelectronics
Kevin H. Chau; Sima Dimitrijev, Editor(s)

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