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Proceedings Paper

Process technologies for high-resolution infrared detectors based on LiTaO3
Author(s): Volkmar Norkus; Gerald Gerlach; Guenter Hofmann
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Paper Abstract

IR system designers increasingly demand pyroelectric detectors demonstrating on the one hand a geometry and number of responsive elements, which are highly user- specific, and a very high signal-to-noise ration on the other. This paper describes the principal design of high- resolution single-element detectors and arrays based on the pyroelectric material lithium tentalate together with subtechnologies for manufacturing. It is shown that the production of self-supporting responsive elements with a thickness smaller than 5 micrometers will be feasible by applying a combined chemical and mechanical polishing together with ion beam etching. In the attempt to increase the absorption coefficient of these elements special silver black coatings are deposited, which result in an absorption coefficient (alpha) >= 0.92 in the wave range pitches of 50 micrometers were reached for ultrasonic bonding processes. Selected detector parameters are used to prove the potential advancement of detector characteristics, which will be feasible by applying these technologies.

Paper Details

Date Published: 1 October 1999
PDF: 8 pages
Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364489
Show Author Affiliations
Volkmar Norkus, Dresden Univ. of Technology and DIAS Angewandte Sensorik GmbH (Germany)
Gerald Gerlach, Dresden Univ. of Technology (Germany)
Guenter Hofmann, DIAS Angewandte Sensorik GmbH (Germany)


Published in SPIE Proceedings Vol. 3892:
Device and Process Technologies for MEMS and Microelectronics
Kevin H. Chau; Sima Dimitrijev, Editor(s)

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