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Proceedings Paper

Design and fabrication of novel photodetector arrays
Author(s): Mary J. Li; Christine A. Allen; Shahid Aslam; Tina C. Chen; Fred M. Finkbeiner; Scott A. Gordon; Jonathan L. Kuhn; David Brent Mott; Carl Michael Stahle; Caroline Kilbourn Stahle; Nilesh Tralshawala; Liqin L. Wang
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Paper Abstract

We are developing novel photodetector arrays based on superconducting transition-edge sensor (TES) and pop-up detector (PUD) technologies. The TES has the potential for a new generation of high sensitivity photodetectors from the IR to the x-ray. This is directly due to the sharpness of the resistance change with temperature at the superconducting transition. The TESs are deposited on the PUD arrays and serve as the sensing elements. The PUDs are close-packed, folded membrane arrays that provide the TES substrate and the thermal isolation required by the bolometers and microcalorimeters. This paper presents the processing-related characterization result of preliminary TES and PUD designs. The gaol of this work is to fabricate a new generation of x-ray calorimeters and IR bolometers for space flight projects.

Paper Details

Date Published: 1 October 1999
PDF: 12 pages
Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364483
Show Author Affiliations
Mary J. Li, Raytheon Systems Co. and NASA Goddard Space Flight Ctr. (United States)
Christine A. Allen, NASA Goddard Space Flight Ctr. (United States)
Shahid Aslam, Raytheon Systems Co. and NASA Goddard Space Flight Ctr. (United States)
Tina C. Chen, Global Science and Technology Inc. and NASA Goddard Space Flight Ctr. (United States)
Fred M. Finkbeiner, NASA Goddard Space Flight Ctr. and Univ. of Maryland/College Park (United States)
Scott A. Gordon, NASA Goddard Space Flight Ctr. (United States)
Jonathan L. Kuhn, NASA Goddard Space Flight Ctr. (United States)
David Brent Mott, NASA Goddard Space Flight Ctr. (United States)
Carl Michael Stahle, NASA Goddard Space Flight Ctr. (United States)
Caroline Kilbourn Stahle, NASA Goddard Space Flight Ctr. (United States)
Nilesh Tralshawala, Raytheon Systems Co. and NASA Goddard Space Flight Ctr. (United States)
Liqin L. Wang, Unisys Corp. and NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 3892:
Device and Process Technologies for MEMS and Microelectronics
Kevin H. Chau; Sima Dimitrijev, Editor(s)

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