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Proceedings Paper

Drop-by-drop deposition of ceramic slurry for fabrication of PZT microstructures
Author(s): Lena Klintberg; Greger Thornell; Stefan A. I. Johansson
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Paper Abstract

Most of the techniques available for ceramic microprocessing, e.g. tape casting, sputtering and sol-gel processing suffer from lack of geometrical flexibility although they often allow for good thickness control. With the interest for ceramic material in MST, especially the piezoelectric lead zirconate titanate, often involving more complex geometries, development of complementary technologies seems motivated.

Paper Details

Date Published: 1 October 1999
PDF: 8 pages
Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364479
Show Author Affiliations
Lena Klintberg, Uppsala Univ. (Sweden)
Greger Thornell, Uppsala Univ. (Sweden)
Stefan A. I. Johansson, Uppsala Univ. (Sweden)


Published in SPIE Proceedings Vol. 3892:
Device and Process Technologies for MEMS and Microelectronics
Kevin H. Chau; Sima Dimitrijev, Editor(s)

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