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Proceedings Paper

Micro tactile sensor with capacitive-inductive function for discrimination of object property
Author(s): Katsunori Shida; Ryo Sato; Katsuya Higa; Tanemasa Asano
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Paper Abstract

We have developed multi-sensing artificial touch devices for the recognition of object properties and its surface situation. In this paper we present the fabrication of a thin-plate micro tactile sensor with two sensing functions of capacitance and inductance, and introduce the results of comparison of characteristics among various types of micro sensor distinctly depend on each size of the sensors, them material of electrodes, and the depth of insulating layer in the sensor. Furthermore, by preparing the shielding layer in the sensor in the way of the fabrication process, it was found that the problem which occurred in miniaturizing the sensor would be solved.

Paper Details

Date Published: 29 September 1999
PDF: 10 pages
Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364456
Show Author Affiliations
Katsunori Shida, Saga Univ. (Japan)
Ryo Sato, Saga Univ. (Japan)
Katsuya Higa, Kyushu Institute of Technology (Japan)
Tanemasa Asano, Kyushu Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 3891:
Electronics and Structures for MEMS
Neil W. Bergmann; Olaf Reinhold; Norman C. Tien, Editor(s)

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