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Proceedings Paper

Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate
Author(s): TaeSun Lim; Yong-Kweon Kim
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Paper Abstract

A vertical spring-type micromirror was fabricated using a SiO2 shielding screen structure. The fabricated vertical springs are well defined but the mirror plate is bent because the mirror plate is composed of SiO2 and aluminum layers. To obtain a flat mirror plate, the stress of SiO2 and aluminum is analyzed and the bending deflection of mirror plate's edge is measured. The measured deflection varies with the thickness of aluminum. Another SiO2 layer on the mirror aluminum improved the flatness of mirror plate.

Paper Details

Date Published: 29 September 1999
PDF: 8 pages
Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364447
Show Author Affiliations
TaeSun Lim, Seoul National Univ. (South Korea)
Yong-Kweon Kim, Seoul National Univ. (South Korea)

Published in SPIE Proceedings Vol. 3891:
Electronics and Structures for MEMS
Neil W. Bergmann; Olaf Reinhold; Norman C. Tien, Editor(s)

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