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Proceedings Paper

Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes
Author(s): Anthony J. Walton; David G. Vass; Ian Underwood; Georg K.H. Bodammer; David Calton; Kris Seunarine; J. Tom M. Stevenson; Alan M. Gundlach
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Paper Abstract

Liquid-crystal over silicon is an established technology for reflective spatial light modulators and microdisplays. This paper reviews their development to date, highlighting in particular the micromachining of the mirror array and the associated packaging issues.

Paper Details

Date Published: 29 September 1999
PDF: 13 pages
Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364442
Show Author Affiliations
Anthony J. Walton, Univ. of Edinburgh (United Kingdom)
David G. Vass, Univ. of Edinburgh (United Kingdom)
Ian Underwood, Univ. of Edinburgh (United Kingdom)
Georg K.H. Bodammer, Univ. of Edinburgh (United Kingdom)
David Calton, Univ. of Edinburgh (United Kingdom)
Kris Seunarine, Univ. of Edinburgh (United Kingdom)
J. Tom M. Stevenson, Univ. of Edinburgh (United Kingdom)
Alan M. Gundlach, Univ. of Edinburgh (United Kingdom)


Published in SPIE Proceedings Vol. 3891:
Electronics and Structures for MEMS
Neil W. Bergmann; Olaf Reinhold; Norman C. Tien, Editor(s)

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