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Proceedings Paper

Microengineered open tubular columns for GC analysis
Author(s): Goib Wiranto; Malcolm R. Haskard; Dennis E. Mulcahy; David E. Davey; Ernest F. Dawes
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Paper Abstract

Microengineered open tubular (MOT) columns with semi rectangular cross-sections have been designed and fabricated using microengineering techniques. The creation of 100-micrometers wide, 20-micrometers deep, and 125-cm long columns employed isotropic etching on (100) silicon and anodic bonding with a Pyrex 7740 glass cover plate. Column geometry has been optimized to achieve maximum efficiency and allow extreme operating conditions. The walls of the microcolumns were coated with a non-polar liquid stationary phase. Performances of the MOT columns have been demonstrated by their ability to completely separate a series of hydrocarbon mixture in less than 1.25 min under isothermal condition of 150 degrees C. The achievable column efficiencies as measured in terms of theoretical plate height ranged from 0.57 to 1.45 mm, which agreed well with theoretical predictions.

Paper Details

Date Published: 29 September 1999
PDF: 10 pages
Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364435
Show Author Affiliations
Goib Wiranto, Univ. of South Australia (Australia)
Malcolm R. Haskard, Univ. of South Australia (Australia)
Dennis E. Mulcahy, Univ. of South Australia (Australia)
David E. Davey, Univ. of South Australia (Australia)
Ernest F. Dawes, SGE International Pty. Ltd. (Australia)


Published in SPIE Proceedings Vol. 3891:
Electronics and Structures for MEMS
Neil W. Bergmann; Olaf Reinhold; Norman C. Tien, Editor(s)

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