Share Email Print

Proceedings Paper

Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining
Author(s): Christophe Gorecki
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper presents the design and the fabrication steps of a novel integrated Mach-Zehnder interferometer with a phase modulation. A well-controlled Si machining as well as ZnO thin-film transducer integration on the same Silicon substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation of 1.3 rad.

Paper Details

Date Published: 15 September 1999
PDF: 6 pages
Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364302
Show Author Affiliations
Christophe Gorecki, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 3825:
Microsystems Metrology and Inspection
Christophe Gorecki, Editor(s)

© SPIE. Terms of Use
Back to Top