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Proceedings Paper

Inspection of microsystems with a laser scanning microscope
Author(s): Gerd Dussler; B. Broecher; Tilo Pfeifer
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Paper Abstract

Hybrid microsystems with optical and mechanical functions can be implemented economically only by an automated assembly. In order to guarantee a high quality of the products, the use of a flexible and simply manageable process control system is necessary. The Laser-Scanning-Microscopy, based on the confocal microscopy, is suitable due to the variable magnification and the threedimensionally visualization ideally for the automated micro-assembly. The confocal Laser-Scanning- Microscope (CLSM) serves in fabrication and also in assembly apart from the process visualization for the analyze for micro surface structures, the detection of defects or the measurement of threedimensional geometries of microparts.

Paper Details

Date Published: 15 September 1999
PDF: 7 pages
Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364295
Show Author Affiliations
Gerd Dussler, Aachen Univ. of Technology (Germany)
B. Broecher, Aachen Univ. of Technology (Germany)
Tilo Pfeifer, Aachen Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 3825:
Microsystems Metrology and Inspection
Christophe Gorecki, Editor(s)

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