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Proceedings Paper

NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements
Author(s): Sylvain M. Martel; Peter Geoffrey Madden; Luke Sosnowski; Ian Warwick Hunter; Serge Lafontaine
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Paper Abstract

The aim of this project is to develop the smallest and most sophisticated wireless fully autonomous instrumented robot capable of subatomic movements. The robot named 'NanoWalker' should bring a new paradigm in the way instruments are built while providing a sophisticated platform for a new range of applications. The project involves primarily the investigation of a new legged locomotion based on piezo-actuators with advanced micro-assembly techniques applied to complex embedded electronic systems; the development of new miniature instruments, micro-manipulators, integrated behavior for controlling, searching and scanning at the atomic scale; and the development of a subatomic navigation system. Besides all the new technologies and techniques that we intend to develop and which will be applicable to many areas and systems, the NanoWalker should provide a suitable yet more flexible and powerful platform compared to traditional macro-scaled instruments. It is anticipated that this new form of highly integrated autonomous microsystem will be used as the main building block for a new generation of measurement and inspection systems. In this paper, the main components of the NanoWalker are briefly described.

Paper Details

Date Published: 15 September 1999
PDF: 12 pages
Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364292
Show Author Affiliations
Sylvain M. Martel, Massachusetts Institute of Technology (United States)
Peter Geoffrey Madden, Massachusetts Institute of Technology (United States)
Luke Sosnowski, Massachusetts Institute of Technology (United States)
Ian Warwick Hunter, Massachusetts Institute of Technology (United States)
Serge Lafontaine, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 3825:
Microsystems Metrology and Inspection
Christophe Gorecki, Editor(s)

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