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Proceedings Paper

Measurement of depth profile of hydrogen isotope atom contained in solid material using resonant laser ablation
Author(s): Masafumi Yorozu; Yasuhiro Okada; Terunobu Nakajyo; Akira Endo
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Paper Abstract

The depth profile of hydrogen isotope atoms was measured by using mass spectrometry combined with resonant laser ablation. A graphite sample was implanted with deuterium by a cyclotron and was employed for the measurements. The graphite sample was ablated by a tunable laser which wavelength was corresponding to the resonant wavelength of 1S - 2S for deuterium with two- photon excitation. The ablated deuterium was ionized by a 2 + 1 resonant ionization process. The ions were analyzed by a time of flight (TOF) mass spectrometer. The deuterium ions were detected very clearly with resonant ablation contrast to non-resonant measurement. The depth profile was determined from the intensity of the mass spectrum and the etching depth. The depth profile was compared to the simulated profiles. Each profile coincided within the error of the numerical simulation.

Paper Details

Date Published: 21 September 1999
PDF: 6 pages
Proc. SPIE 3824, Optical Measurement Systems for Industrial Inspection, (21 September 1999); doi: 10.1117/12.364252
Show Author Affiliations
Masafumi Yorozu, Sumitomo Heavy Industries, Ltd. (Japan)
Yasuhiro Okada, Sumitomo Heavy Industries, Ltd. (Japan)
Terunobu Nakajyo, Sumitomo Heavy Industries, Ltd. (Japan)
Akira Endo, Sumitomo Heavy Industries, Ltd. (Japan)


Published in SPIE Proceedings Vol. 3824:
Optical Measurement Systems for Industrial Inspection
Malgorzata Kujawinska; Wolfgang Osten, Editor(s)

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