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Proceedings Paper

High-speed optical 3D roughness measurements
Author(s): Robert Windecker; Stefan Franz; Hans J. Tiziani
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Paper Abstract

A set-up based on a zoom stereo microscope is presented which can be used for fast and robust microstructure analysis on engineering surfaces. A fringe projection technique with an optimized grating pattern is used to determine the third dimension of the specimen. Due to the zoom objective the set- up can be quickly adapted to different fields of view. The magnification dependent vertical resolution can be as high as 0.1 micrometer with measuring times of less than a few seconds for 768 X 568 pixels. This very high speed together with the flexibility of the set-up is of great advantage for tribological investigations of metal sheets for example. After a brief description of the set-up and the algorithms used for the measurement evaluation, the mains emphasize is given for the application of the fringe projection technique to the determination of roughness parameters. Conditions like the optimal size of the field of view and others are given. In particular we give some studies for the comparability to a tactile sensor and to other optical sensors like white-light interferometry and confocal microscopy and present results of measurements on metal sheets and paper.

Paper Details

Date Published: 21 September 1999
PDF: 10 pages
Proc. SPIE 3824, Optical Measurement Systems for Industrial Inspection, (21 September 1999); doi: 10.1117/12.364244
Show Author Affiliations
Robert Windecker, Univ. Stuttgart (Germany)
Stefan Franz, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 3824:
Optical Measurement Systems for Industrial Inspection
Malgorzata Kujawinska; Wolfgang Osten, Editor(s)

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