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Proceedings Paper

Application of fiber optic sensors in waste water management from microelectronics fabrication processes
Author(s): Dumitru Gh. Ulieru
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Paper Abstract

The concept of waste water treatment from microelectronics fab processes is referring to waste water discharged from ultrapure water plant which can't be treated on recovery waste water section. These wastes concentrated contains organic and inorganic acids, alkalis, metals, cyanide, chromium and fluoride effluent from fab processes. They will be canalized on qualities for treatment sections which permit the discharge of treated waste water as neutral with solids removal as compacted sludge. For management of waste water treatment plant we are using the fiber optic sensors as follows: level and flow control, signalization automatic pumps control and protection, solid control, leak detection a.s.o. The neutral quality of treated water has 'null' impact against of environmental system recommended for all semiconductors and microelectronics fab processes.

Paper Details

Date Published: 16 September 1999
PDF: 10 pages
Proc. SPIE 3821, Environmental Sensing and Applications, (16 September 1999); doi: 10.1117/12.364191
Show Author Affiliations
Dumitru Gh. Ulieru, ROMES S.A. (Romania)


Published in SPIE Proceedings Vol. 3821:
Environmental Sensing and Applications
Michel R. Carleer; Moira Hilton; Torsten Lamp; Rainer Reuter; George M. Russwurm; Klaus Schaefer; Konradin Weber; Klaus C. H. Weitkamp; Jean-Pierre Wolf; Ljuba Woppowa, Editor(s)

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