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Proceedings Paper

Photocantilever: an integrated microprobe for near-field optical microscopy
Author(s): Kenji Fukuzawa; Yuriko Tanaka; Hiroki Kuwano; Hiroshi Yoshikawa; Toshifumi Ohkubo; Tadashi Kato
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Paper Abstract

We have developed an integrated micro-probe with improved detection efficiency for apertureless near-field scanning optical microscopy (NSOM) by using micromachining techniques; we call this probe a `photocantilever'. A photocantilever is an integrated micro-cantilever with a pn- junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional NSOM probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal- reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.

Paper Details

Date Published: 22 September 1999
PDF: 11 pages
Proc. SPIE 3791, Near-Field Optics: Physics, Devices, and Information Processing, (22 September 1999); doi: 10.1117/12.363858
Show Author Affiliations
Kenji Fukuzawa, Nippon Telegraph and Telephone Corp. (Japan)
Yuriko Tanaka, Nippon Telegraph and Telephone Corp. (Japan)
Hiroki Kuwano, Nippon Telegraph and Telephone Corp. (Japan)
Hiroshi Yoshikawa, Nippon Telegraph and Telephone Corp. (Japan)
Toshifumi Ohkubo, Nippon Telegraph and Telephone Corp. (Japan)
Tadashi Kato, Nippon Telegraph and Telephone Corp. (Japan)


Published in SPIE Proceedings Vol. 3791:
Near-Field Optics: Physics, Devices, and Information Processing
Suganda Jutamulia; Motoichi Ohtsu; Toshimitsu Asakura, Editor(s)

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