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Proceedings Paper

Photochemical vapor deposition by optical near field
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Paper Abstract

In-situ patterning of nano-scale Zn dots and lines has been succeeded by photodissociation of a gas-phase diethylzinc in optical near-field. By using an optical fiber probe with the aperture diameter of 60 nm, dots with full width at half maximum of approximately 60 nm and approximately 70 nm, closely separated by 100 nm were fabricated. It implies that finer patterns of a metal can be fabricated by using optical fiber probe with smaller aperture, allowing control of the size and position of nano-scale structures. Consequently, the technique is the one of most suitable for nano-photonic device fabrication.

Paper Details

Date Published: 22 September 1999
PDF: 8 pages
Proc. SPIE 3791, Near-Field Optics: Physics, Devices, and Information Processing, (22 September 1999); doi: 10.1117/12.363849
Show Author Affiliations
Yoh Yamamoto, Tokyo Institute of Technology (Japan)
Vitali V. Polonski, Tokyo Institute of Technology (Japan)
Geun Hyoung Lee, Japan Science and Technology Corp. (Japan)
Motonobu Kourogi, Tokyo Institute of Technology and Japan Science and Technology Corp. (Japan)
Motoichi Ohtsu, Tokyo Institute of Technology and Japan Science and Technology Corp. (Japan)


Published in SPIE Proceedings Vol. 3791:
Near-Field Optics: Physics, Devices, and Information Processing
Suganda Jutamulia; Motoichi Ohtsu; Toshimitsu Asakura, Editor(s)

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