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Proceedings Paper

Subwavelength-sized phase-change recording with a silicon planar apertured probe
Author(s): Takashi Yatsui; Motonobu Kourogi; Kazuo Tsutsui; Junichi Takahashi; Motoichi Ohtsu
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Paper Abstract

We propose and demonstrate a new optical near-field slider with a planar apertured probe array for optical memory. The slider was fabricated by utilizing anisotropical etching of a silicon membrane and anodic bonding of a silicon membrane and glass substrate. We also present for the first time a subwavelength-sized phase-change recording/reading by using the planar apertured probe array. Apertures were fabricated at the bottom end of the pyramidal grooves. A SiO2/AgInTe2/glass substrate was used as the recording medium. By scanning the planar apertured probe array, we obtained resolved images with line width of 250 nm.

Paper Details

Date Published: 22 September 1999
PDF: 9 pages
Proc. SPIE 3791, Near-Field Optics: Physics, Devices, and Information Processing, (22 September 1999); doi: 10.1117/12.363844
Show Author Affiliations
Takashi Yatsui, Tokyo Institute of Technology (Japan)
Motonobu Kourogi, Tokyo Institute of Technology and Kanagawa Academy of Science and Technology (Japan)
Kazuo Tsutsui, Tokyo Institute of Technology (Japan)
Junichi Takahashi, Ricoh Co., Ltd. (Japan)
Motoichi Ohtsu, Tokyo Institute of Technology and Kanagawa Academy of Science and Technology (Japan)


Published in SPIE Proceedings Vol. 3791:
Near-Field Optics: Physics, Devices, and Information Processing
Suganda Jutamulia; Motoichi Ohtsu; Toshimitsu Asakura, Editor(s)

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