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Proceedings Paper

Concrete pedestals for high-performance semiconductor production equipment
Author(s): Wayne Vogen; Craig L. Franklin; Joseph Morneault
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Paper Abstract

Concrete pedestals have many vibration and stiffness characteristics that make them a superior choice for sensitive semiconductor production equipment including scanners, scanning electron microscopes, focused ion beam millers and optical inspection equipment. Among the advantages of concrete pedestals are high inherent damping, monolithic construction that eliminates low stiffness joints common in steep pedestals, ability to reuse and ease of installation. Steel pedestals that have plates attached to the top of the frame are easily excited by acoustic excitation, especially in the range from 50 Hertz to 400 Hertz. Concrete pedestals do not suffer from this phenomenon because of the high mass and damping of the top surface.

Paper Details

Date Published: 28 September 1999
PDF: 4 pages
Proc. SPIE 3786, Optomechanical Engineering and Vibration Control, (28 September 1999); doi: 10.1117/12.363839
Show Author Affiliations
Wayne Vogen, Vibration Engineering Consultants, Inc. (United States)
Craig L. Franklin, Vibration Engineering Consultants, Inc. (United States)
Joseph Morneault, Stable Table (United States)


Published in SPIE Proceedings Vol. 3786:
Optomechanical Engineering and Vibration Control
Eddy A. Derby; Eddy A. Derby; Colin G. Gordon; Colin G. Gordon; Daniel Vukobratovich; Carl H. Zweben; Daniel Vukobratovich; Paul R. Yoder; Carl H. Zweben, Editor(s)

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