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Proceedings Paper

Microcomputer-controlled scanning Fabry-Perot interferometer
Author(s): Weirui Zhao; Naiwen He; Genrui Cao
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Paper Abstract

Using the technique of capacitance micrometry it is possible to measure very small displacements. Here, a microcomputer- controlled scanning Fabry-Perot interferometer is presented. In each scanning step, the parallelism of Fabry-Perot interferometer is monitored and adjusted in real-time with the aid of three capacitance micrometers - it is the feature of this system, where the readjustment and scanning are realized with three electrostrictive actuators, and the parallelism and the spacing of the mirrors are controlled by three capacitance micrometers. The light information from the interferometer is detected by a photo-detector. All of these are controlled by a microcomputer in order to realize the scanning and real-time control of Fabry-Perot interferometer. This system removes the problem of the nonlinear response and hysteresis associated with electrostrictive actuators and allows precise control of both parallelism and spacing of the mirrors.

Paper Details

Date Published: 28 September 1999
PDF: 8 pages
Proc. SPIE 3786, Optomechanical Engineering and Vibration Control, (28 September 1999); doi: 10.1117/12.363834
Show Author Affiliations
Weirui Zhao, Beijing Institute of Technology (China)
Naiwen He, Univ. of Tianjing (China)
Genrui Cao, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 3786:
Optomechanical Engineering and Vibration Control
Eddy A. Derby; Eddy A. Derby; Colin G. Gordon; Colin G. Gordon; Daniel Vukobratovich; Carl H. Zweben; Daniel Vukobratovich; Paul R. Yoder; Carl H. Zweben, Editor(s)

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