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Proceedings Paper

Treatise on acoustical performance for state-of-the-art clean rooms
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Paper Abstract

Historically, clean room acoustical performance has been specified in the 65 dBA or NC-60 range. As line width geometries continue to shrink and metrology tools are introduced into the clean room at an increasing rate, some consideration on what constitutes appropriate and achievable clean room acoustical performance is long overdue. This paper addresses acoustical performance limitations for clean rooms under various air recirculation systems. The issue of what constitutes practical acoustical limits is also discussed. These limitations are put into the context of manufacturer specifications for metrology tools while addressing resulting consequences.

Paper Details

Date Published: 28 September 1999
PDF: 8 pages
Proc. SPIE 3786, Optomechanical Engineering and Vibration Control, (28 September 1999); doi: 10.1117/12.363795
Show Author Affiliations
Christopher A. Papadimos, Advanced Engineering Solutions/Illingworth & Rodkin, Inc. (United States)


Published in SPIE Proceedings Vol. 3786:
Optomechanical Engineering and Vibration Control
Eddy A. Derby; Eddy A. Derby; Colin G. Gordon; Colin G. Gordon; Daniel Vukobratovich; Carl H. Zweben; Daniel Vukobratovich; Paul R. Yoder; Carl H. Zweben, Editor(s)

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