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Proceedings Paper

Diffraction grating groove analysis used to predict efficiency and scatter performance
Author(s): David A. Content
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Paper Abstract

Atomic force microscopy and other advanced metrology tools now allow detailed determination of the groove profiles and surface morphology of diffraction gratings and other diffractive structures. Modern electromagnetic models allow prediction of the efficiency performance of diffraction gratings in many applications. In addition, tools exist to predict the scatter from low roughness mirrors such as are used for ultraviolet to X-ray optical systems. We describe a program to apply these tools and software developed using commercial off the shelf tools such as IDL and PcGrate to a highly selected set of diffraction gratings developed for the HST/STIS instruments. Both efficiency and scatter predictions are compared with experimental data.

Paper Details

Date Published: 17 September 1999
PDF: 12 pages
Proc. SPIE 3778, Gradient Index, Miniature, and Diffractive Optical Systems, (17 September 1999); doi: 10.1117/12.363756
Show Author Affiliations
David A. Content, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 3778:
Gradient Index, Miniature, and Diffractive Optical Systems
Alan D. Kathman, Editor(s)

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