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Proceedings Paper

Fabrication of self-supporting transmission gratings for plasma diagnostics
Author(s): Xiangdong Xu; Yilin Hong; Yangchao Tian; Tonglin Huo; Hongjun Zhou; Xiaoming Tao; Shiping Jiang; Shaojun Fu
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Paper Abstract

With holographic-ion beam etching technique, a number of self-supporting transmission gratings have been fabricated for inertial confinement fusion diagnosis. In addition to the general process, a practical method for monitoring the evolution of the grating structures exposed in photoresist during development of the resist. The real-time monitor technique developed here is relatively simple in comparison with a He-Ne laser and detector, which needs delicate control.

Paper Details

Date Published: 29 September 1999
PDF: 6 pages
Proc. SPIE 3766, X-Ray Optics, Instruments, and Missions II, (29 September 1999); doi: 10.1117/12.363652
Show Author Affiliations
Xiangdong Xu, Univ. of Science and Technology of China (China)
Yilin Hong, Univ. of Science and Technology of China (China)
Yangchao Tian, Univ. of Science and Technology of China (China)
Tonglin Huo, Univ. of Science and Technology of China (China)
Hongjun Zhou, Univ. of Science and Technology of China (China)
Xiaoming Tao, Univ. of Science and Technology of China (China)
Shiping Jiang, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 3766:
X-Ray Optics, Instruments, and Missions II
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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