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Proceedings Paper

Self-aligned assembly of microlens arrays with micromirrors
Author(s): Adisorn Tuantranont; Victor M. Bright; Wenge Zhang; Jianglong Zhang; Y. C. Lee
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Paper Abstract

Lenslet integrated Micro-Electro-Mechanical Deformable Micromirrors (LMEM-DMs) are electrostatic micromirror arrays fabricated through a commercial surface micromachining process and integrated with polymer or glass microlenses. The electronics resins (Photo-BCB) which are photo-sensitive polymers were used to fabricate polymer microlens arrays. A 4 X 4 element photo-BCB Cyclotene microlens array was fabricated on a thin quartz substrate. Self-aligned soldering flip-chip assembly is applied to integrate microlens arrays directly over the micromirrors. The lens/mirror gap is controlled using the final height of solder balls, and the lateral alignment is achieved by the solder self-aligning mechanism. The LMEM-DM is attractive due to its low cost and the low drive voltages. The use of a lenslet to focus the incoming laser beam onto the reflective surface of a micromirror substantially increases overall optical fill factor of the micromirror array. The LMEM-DM provides superior aberration correction with low residual diffraction effects. For mirror deflections much smaller than the lenslet focal length, the LMEM-DM behaves as a phase-only modulating optical element. The LMEM-DM thus serves as a rugged, compact optical element for beam steering, beam shaping, and aberration correction applications.

Paper Details

Date Published: 2 September 1999
PDF: 11 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361293
Show Author Affiliations
Adisorn Tuantranont, Univ. of Colorado/Boulder (United States)
Victor M. Bright, Univ. of Colorado/Boulder (United States)
Wenge Zhang, Univ. of Colorado/Boulder (United States)
Jianglong Zhang, Univ. of Colorado/Boulder (United States)
Y. C. Lee, Univ. of Colorado/Boulder (United States)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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