Share Email Print

Proceedings Paper

Charging effects in electrostatically actuated membrane devices
Author(s): Keith W. Goossen; James A. Walker; Joseph Earl Ford
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We have observed the effects of electrical charging in the Mechanical Anti-Reflection Switch (MARS) device for some time. The MARS device has a membrane that is pulled toward the substrate by application of an electrical bias, and thereby produces optical modulation. Under constant bias MARS devices with insulating membranes exhibit a slow (minutes to hours) change in air gap. We have now determined that this is due to ionization in the air gap, and that the effect can be greatly reduced by placing the device in an argon atmosphere. It is postulated that the effect is due to the formation of a space charge region in the air gap adjacent to the membrane.

Paper Details

Date Published: 2 September 1999
PDF: 9 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361287
Show Author Affiliations
Keith W. Goossen, Lucent Technologies/Bell Labs. (United States)
James A. Walker, Lucent Technologies/Bell Labs. (United States)
Joseph Earl Ford, Lucent Technologies/Bell Labs. (United States)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

© SPIE. Terms of Use
Back to Top