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Proceedings Paper

Pixel-by-pixel aberration correction for scanned-beam micro-optical instruments
Author(s): David L. Dickensheets; Paul V. Ashcraft; Phillip A. Himmer
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Paper Abstract

Variable aberration compensation elements designed to correct the primary aberrations, and capable of sufficient speed for on-the-fly correction, can significantly extend the diffraction-limited field of view of scanned-beam instruments using practical microlens systems. In this paper we review the relevant aberration theory and discuss the requirements for compensation elements as well as appropriate architectures for correction of a scanned-beam instrument. We report correction of astigmatism and field curvature in an F/20 optical system using deformable polysilicon reflective membranes. Devices were successfully demonstrated that compensated more than 1.5 waves of defocus and more than 1 wave of astigmatism with less than 1/10 wave of spherical aberration, and with a bandwidth in excess of 20 kHz, which is suitable for high speed beam scanning applications such as video-rate imaging.

Paper Details

Date Published: 2 September 1999
PDF: 10 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361286
Show Author Affiliations
David L. Dickensheets, Montana State Univ. (United States)
Paul V. Ashcraft, Montana State Univ. (United States)
Phillip A. Himmer, Montana State Univ. (United States)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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