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Proceedings Paper

Programmable two-dimensional microshutter arrays
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Paper Abstract

We are developing a two-dimensional array of microshutters which can be used as a high efficiency, high contrast field selection device for a multi-object spectrometer for the Next Generation Space Telescope (NGST). The device is a close- packed array of shutters, with a typical size of 100 microns square and area filling factor of up to 80%. Each shutter, made of single crystal silicon with an appropriate optical coating, pivots on a torsion flexure along one edge. Each of the shutters is individually selectable. An original double- shutter mechanism is employed for actuation. Since the device works in transmission, there is no loss of contrast due to diffraction from the edges of unactuated pixels. When working in reflection, the device can also be used as a micromirror array.

Paper Details

Date Published: 2 September 1999
PDF: 6 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361284
Show Author Affiliations
Samuel Harvey Moseley, NASA Goddard Space Flight Ctr. (United States)
Rainer K. Fettig, Raytheon ITSS and NASA Goddard Space Flight Ctr. (United States)
Alexander S. Kutyrev, Raytheon ITSS and NASA Goddard Space Flight Ctr. (United States)
Charles W. Bowers, NASA Goddard Space Flight Ctr. (United States)
Randy A. Kimble, NASA Goddard Space Flight Ctr. (United States)
Jon Orloff, Univ. of Maryland/College Park (United States)
Bruce E. Woodgate, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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