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Proceedings Paper

Photovoltaic on-demand high-voltage pulse generator as an on-board power source for electrostatic actuator array
Author(s): Jeong-Bong Lee; Mark G. Allen; Ajeet Rohatgi
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Paper Abstract

The use of amorphous silicon solar cell array high voltage power source as an on-demand wireless power source for electrostatically actuated 32 X 32 micromirror array is presented. The amorphous silicon solar cell array has been reported previously by authors of this paper. In this work, the solar cell array has been used to drive distributed electrostatic actuator array (micromirror array in this particular paper). A 32 X 32 micromirror array has been fabricated and the size of single micromirror is 200 micrometer X 200 micrometer. Static deflection test of micromirrors has been carried out and pull-in voltage of 44 V and releasing voltage of 30 V was found. The electrical output of the solar cell array has been directly connected to the 32 X 32 micromirror array to demonstrate a wireless powered distributed MEMS actuator array. A total solar cell array area of 0.3 cm2 (30 series-interconnected solar cells) were used to drive a part of 32 X 32 micromirror array (a total array area of 0.4 cm2). Motion of multiple numbers of micromirrors was reproducibly observed. The ultimate goal of this research is to achieve power-integrated autonomous MEMS using solar cell array as a miniaturized wireless on-board power source and distributed actuator array as a locomotive engine.

Paper Details

Date Published: 2 September 1999
PDF: 9 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361277
Show Author Affiliations
Jeong-Bong Lee, Louisiana State Univ. (United States)
Mark G. Allen, Georgia Institute of Technology (United States)
Ajeet Rohatgi, Georgia Institute of Technology (United States)


Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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