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Proceedings Paper

Miniaturized time-scanning Fourier Transform Spectrometer based on silicon technology
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Paper Abstract

Optical MEMS is a challenging new field that combines micro- optics with micro-mechanics in order to build compact systems. In this paper we present a miniaturized Fourier transform spectrometer (FTS) fabricated on silicon. The FTS is a Michelson interferometer with one scanning mirror. The motion of the mirror is carried out by a new type of electrostatic comb drive actuator. The mirror is designed to be linear with respect to the applied voltage. Experimentally, we have measured a mirror displacement of 38.5 micrometer corresponding to a maximum optical path difference of 77 micrometer. The applied voltage was plus or minus 10 V and the non-linearity of the driving system is plus or minus 0.25 micrometer. A method is presented to correct the spectrum in order to get rid of the non-linearity. The measured resolution of the spectrometer after the phase correction is 16 nm at a wavelength of 633 nm.

Paper Details

Date Published: 2 September 1999
PDF: 9 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361276
Show Author Affiliations
Omar Manzardo, Univ. de Neuchatel (Switzerland)
Hans Peter Herzig, Univ. de Neuchatel (Switzerland)
Cornel Marxer, Univ. de Neuchatel (Switzerland)
Nico F. de Rooij, Univ. de Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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