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Proceedings Paper

Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench
Author(s): Alexander Ksendzov; Richard D. Martin; Darius Modarress; Mory Gharib
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Paper Abstract

We have built a miniature illuminator for Laser Doppler velocimeter on micromachined silicon optical bench utilizing a novel optical scheme. We used two intersecting coherent beams from the two opposing facets of semiconductor laser die to form a standing interference pattern needed for the particle detection and velocity measurement. Such devices are of interest to NASA for investigating wind patterns and dust loading on planets with atmosphere. They have been applied to problems where the liquid or gas flux must be characterized without disturbing the flow. In addition, the small probe volume makes possible local flow characterization and profiling. The device fabrication, and the results of the fringe characterization and velocity measurements are presented and discussed.

Paper Details

Date Published: 2 September 1999
PDF: 6 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361273
Show Author Affiliations
Alexander Ksendzov, Jet Propulsion Lab. (United States)
Richard D. Martin, W.L. Gore and Associates (United States)
Darius Modarress, California Institute of Technology (United States)
Mory Gharib, California Institute of Technology (United States)


Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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